This article was originally published on September 20, 2021, and updated on May 14, 2025.
In the semiconductor industry, precision and purity are non-negotiable. Even the slightest contamination can compromise the performance of an entire manufacturing process. That’s why pressure instrumentation must meet the highest standards for cleanliness, chemical compatibility and reliability.
Whether you're managing wafer fabrication or plating processes, you need a gauge designed to protect your process, your equipment and your product integrity. Ashcroft understands this challenge and has been providing semiconductor manufacturers with effective solutions for decades. Equipped with extensive industry-specific experience, we engineer, manufacture, test and distribute the instruments necessary to keep your semiconductor production running with optimal results.
Read this article to learn how one of those instruments, the Ashcroft® 63 mm HPT Pressure Gauge, delivers trusted performance in chemical delivery systems, ultrapure water applications and other critical environments.
At the end of the article, you will be directed to additional resources to learn more about semiconductor processes and choosing the best instruments for your applications.
Why consider the HPT pressure gauge for semiconductor applications?
Semiconductor manufacturing demands like ultrapure water environments where even trace contaminants can compromise product integrity. The HPT Anti-Corrosion Pressure Gauge is engineered to meet the strict requirements of these applications, making it a trusted choice for environments where contamination control, chemical compatibility and process reliability are top priority.
HPT highlights the gauge's compatibility with chemically aggressive and non-contaminating fluids found in semiconductor and pharmaceutical environments. The fluoropolymer-wetted parts prevent metal ion elution, making it perfect for ultrapure or deionized water processes, including:
- Chemical delivery systems. Ensures accurate pressure readings for corrosive media while safeguarding system integrity.
- Wafer manufacturing. Monitors pressure precisely in environments where contamination control is critical.
- Ultrapure and deionized water lines. Prevents metal ion elution thanks to all-fluoropolymer wetted parts.
- Plating and etching processes. Withstands aggressive chemistries common in surface treatments.
- Pharmaceutical and high-purity industries. Maintains hygiene and system reliability in sensitive environments.
Key features of this semiconductor pressure gauge
The HPT is more than a standard gauge—it’s built from the inside out to support ultra-clean, high-performance operations:
- Fluoropolymer wetted parts. PTFE/PFA construction resists corrosion and prevents contamination in chemical or water-based systems.
- Class 10,000 Cleanroom Assembly. Minimizes particle introduction, critical for semiconductor-grade installations.
- Nitrogen leak tested. Ensures gas-tight operation for consistent, long-term reliability.
- Compact 63 mm size. Ideal for dense equipment layouts or space-constrained installations.
- Polyethylene sealed packaging. Nitrogen-flushed and sealed post-assembly to maintain cleanliness until deployment.
Benefits of fluoropolymer material
As stated previously, with fluoropolymer wetted parts, the gauge is compatible with processes using corrosive or non-contaminating fluids. In non-contaminating applications, these wetted parts prevent metal ion elution, making it perfect for ultrapure or deionized water processes where:
- Localized corrosion can appear in the semiconductor industry.
- There can be pitting or stress cracking in stainless steel, which is the major risk factor.
- There is extractive metallurgy/leaching of ore with acids.
- Mineral acids and strong organic acids are present.
- Metastable process media that can undergo catalytic decomposition when in contact with molybdenum (i.e., nitric acid, hydrazine) are present.
Gauges made from stainless steel, on the other hand, can corrode or release metal ions and oxides, leading to contamination and particles.
Technical specifications for semiconductor pressure monitoring
The HPT model’s precision and versatility make it suitable for a wide range of pressure monitoring tasks in semiconductor environments:
Accuracy: ±1.5% of span (≥90 psi) and ±2.0% (<90 psi)
Pressure ranges: Vacuum to 145 psi
Process connections: Tube Stub (1/4”, 3/8”, ½”, 6 mm, and 8 mm), G 3/8” or R 3/8” options
Operating temperatures: 10 °F to 85 °F (-12 °C to 29 °C)
Wetted parts: PFA bellows, PTFE sockets
Non-wetted parts: Polypropylene case, PET resin window
Weight: Approximately 190 grams
Quality and compliance in every anti-corrosion semiconductor pressure gauge
Ashcroft’s reputation is built on consistency, quality, and compliance—key traits for OEMs and manufacturers in regulated industries:
- RoHS compliant: Free of hazardous substances, meeting environmental and workplace safety requirements
- Unique serialization: Every gauge is individually marked with a 7-digit serial number for traceability
- Rigorous inspection & testing: Gauges are tested beyond standard specs to ensure long-term reliability in demanding environments
NOTE: This gauge is not recommended for use in gas or high-temperature applications. If an application is using HF or HCl chemicals, they can permeate PTFE, resulting in corrosion. For this type of process, you would need to use a second-generation fluoropolymer like FEP or PFA.
Generally speaking, try to avoid polymers in plasma etching, as polymers can be damaged and generate particles.
How much does the HPT Anti-Corrosion Pressure Gauge cost?
It's important to note that PTFE materials can drive up the price to around three times that of stainless steel, depending on Ra finish and cleanroom level. While stainless steel gauges can range from $90 - $270), these models can cost upwards of $800. If price is not a concern, this gauge can be a successful addition to your corrosive application equipment.
Ready to learn more?
The Ashcroft® HPT Pressure Gauge is a solid choice for corrosive fluids in semiconductor applications. Though the price is higher than a standard gauge, the fluoropolymer materials will stand up to the most challenging semiconductor process to give you reliable and safe pressure measurements.
The following articles can give you more insight to semiconductor manufacturing and the pressure and temperature instruments that may be beneficial to your operation.
- How to Select a UHP Pressure Gauge for Semiconductor Applications
- How do I select a pressure transducer for Semiconductor UHP liquid applications?
- How do I select a Pressure Transducer for Semiconductor UHP Gas applications?
Contact us to talk to one of our industry experts and get all your pressure gauge questions answered. In the meantime, take a look at our guide to learn more about pressure instruments for semiconductor applications. 