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When you think of semiconductors, you may picture all the ways they make our lives easier. After all, we rely on semiconductor applications every day for conveniences like cell phones, computers, cars and other electronic devices. But for those of you who work in semiconductor manufacturing, you also know the demanding and challenging nature of making them. The hazardous nature of the manufacturing process requires stringent protocols, approvals and specialized equipment that can perform with precision and accuracy under harsh conditions. So, when it comes to monitoring the distribution of ultra-high purity (UHP) gases flowing through the process, choosing the right pressure gauge is critical. As a product lead at Ashcroft – a recognized authority in pressure and temperature instrumentation - I have been working with Ultra High Purity (UHP) Pressure Gauges for several years. In my role, I am often asked how to choose the right UHP gauge for these kinds of applications. Of course, my answer is, it depends. In this article, I will review how and where semiconductors are made, the role UHP gases play in the manufacturing process and the specific features you will need when choosing a pressure gauge for UHP applications. When you are finished reading, you will also see additional resources that you can use as a reference on the topic of high purity.

Pressure sensors, including pressure transducers and pressure transmitters, are a critical aspect of semiconductor manufacturing. These instruments measure pressure to control the flow and distribution of ultrahigh purity (UHP) gases and liquids safely and effectively throughout the production process. In my last article about transducers for semiconductor UHP gas applications, I explained how Ashcroft and our parent company Nagano Keiki Co. LTD, have been providing pressure and temperature instrumentation to semiconductor manufacturing customers globally for decades. This piece will provide more insight into the liquid process of semiconductor manufacturing and review the pressure monitoring features to look for in instruments that are designed to perform well in these complex processes. When you are done reading, I hope you will have a better understanding of the use of UHP fluids in semiconductor applications and the solutions employed to accurately measure pressure. You will also find related articles and guides that you can use as references for this evolving topic.

If you work in semiconductor manufacturing, you understand that the process requires highly specialized equipment and instruments that can handle harsh applications involving corrosive gases and chemicals. Transducers, for example, are critical for measuring pressure throughout the production process to control the flow and distribution of ultra-high purity (UHP) gases safely and effectively. However, not all transducers can handle such challenging conditions. That’s why selecting the right one for your operation is a critical step in ensuring the successful creation of your product. Ashcroft and our parent company Nagano Keiki Co. LTD, have a long and proven track record of supplying pressure and temperature instrumentation to semiconductor manufacturing customers worldwide. This article will share our insights into semiconductor UHP gas processes and the unique challenges for pressure measurement instrumentation used in semiconductor applications. It will also review the best types of pressure transducers that are designed for these complex processes.

Pressure transducers used in the semiconductor industry need to be designed and manufactured with materials that can prevent contamination in your process, and also handle corrosive liquids or gases in certain applications such as cleaning equipment and wet stations. Ashcroft has recently released the ZL95 fluoropolymer pressure transducer with a 4-digit LED display, specially made for corrosive environments. The PTFE/PFA wetted parts provide extended cycle life and corrosion resistance. This review will look at the features of this pressure transducer and how it can provide reliable pressure measurements for your semiconductor application.

Semiconductor applications require specialized equipment to handle gas applications and the corrosive fluids involved in wafer manufacturing and plating processing. Reliability and safety are crucial characteristics for pressure measuring instruments in these situations. So, what is the best type of pressure gauge to use for the corrosive fluids in the semiconductor industry?