Pressure transducers used in the semiconductor industry need to be designed and manufactured with materials that can prevent contamination in your process, and also handle corrosive liquids or gases in certain applications such as cleaning equipment and wet stations. Ashcroft has recently released the ZL95 fluoropolymer pressure transducer with a 4-digit LED display, specially made for corrosive environments. The PTFE/PFA wetted parts provide extended cycle life and corrosion resistance. This review will look at the features of this pressure transducer and how it can provide reliable pressure measurements for your semiconductor application.

If you work in the semiconductor industry, you know that there are applications that require specialized equipment to handle corrosive liquids or gases, such as cleaning and wet etching. These processes use corrosive chemicals and ultra-high purity water. Chip manufacturers need to control these liquids accurately. The pressure transducer used must be anti-corrosive, low metal ion elusion and, of course, accurate. When your semiconductor process requires pressure measurement, you need the best instruments for the job.

With the lowed cost of sensing technology and improved standardized protocols, the benefit of interfacing sensors with digital communication is finally being realized. Standardized protocols such as CANbus allow for direct communication between sensors and electronic control units (ECU). These protocols can help improve overall system efficiency and speed by reducing I/O uncertainties, simplify wiring and help to prioritize signals. They also help to define failure mode signals and error checks.