--- title: How Do I Select a Pressure Transducer for Semiconductor UHP Gas Applications? description: Learn how to select the right pressure transducer for semiconductor UHP gas systems by understanding key factors like size, materials, and sensing technology. image: https://blog.ashcroft.com/hubfs/SemiCond_GasMonitoring_BLOG_1026.jpg --- [Skip to main content](https://blog.ashcroft.com/challenges-selecting-transducers-for-semiconductor-manufacturing#maincontent) Select Region - [US & Canada](https://ashcroft.com) - [Europe](https://ashcroft.eu/) - [China](http://www.ashcroft.com.cn/) - [Mexico & Central America](http://www.ashcroft.com.mx/) - [South America](https://ashcroftsudamericana.com/) - [Brazil](https://ashcroft.com.br/) Login - [Distributor Extranet](https://extranet.ashcroft.com/) - [Product Configurator](https://www.ashcroft.com/my-account/) [Careers](https://www.ashcroft.com/careers) [Contact](https://www.ashcroft.com/contact/) [![ashcroft-logo-lg-2](https://blog.ashcroft.com/hs-fs/hubfs/ashcroft-logo-lg-2.png?width=261&height=60&name=ashcroft-logo-lg-2.png) ![ashcroft-logo-white](https://blog.ashcroft.com/hubfs/assets/images/ashcroft-logo-white.svg)](https://www.ashcroft.com/) Products Pressure Instruments - [Pressure Gauges](https://www.ashcroft.com/products/pressure/pressure-gauges) - [Pressure Switches](https://www.ashcroft.com/products/pressure/pressure-switches) - [Pressure Sensors (Transducers/Transmitters)](https://www.ashcroft.com/products/pressure/pressure-sensors) - [Diaphragm Seals-Isolators](https://www.ashcroft.com/products/pressure/diaphragm-seals-and-isolators) - [Accessories](https://www.ashcroft.com/products/pressure/accessories) - [SMART Transmitter Assemblies](https://www.ashcroft.com/products/pressure/smart-transmitter-assemblies) Temperature Instruments - [Thermometers](https://www.ashcroft.com/products/temperature/thermometers) - [Thermowells](https://www.ashcroft.com/products/temperature/thermowells) - [Temperature Switches](https://www.ashcroft.com/products/temperature/temperature-switches) - [RTDs](https://www.ashcroft.com/products/temperature/rtds) - [Thermocouples](https://www.ashcroft.com/products/temperature/thermocouples) - [Temperature Transmitters](https://www.ashcroft.com/products/temperature/temperature-transmitters/) - [MultiPoint Temperature Sensors](https://www.ashcroft.com/products/temperature/multipoint-temperature-sensors/) - [OEM Temperature Sensors](https://www.ashcroft.com/products/temperature/oem-temperature-sensors) Test Instruments - [Calibrators](https://www.ashcroft.com/products/test-instruments/calibrators/) - [Hand Pumps-Controllers](https://www.ashcroft.com/products/test-instruments/hand-pumps-and-controllers/) - [Hydraulic Testers](https://www.ashcroft.com/products/test-instruments/hydraulic-testers/) - [Test Gauges](https://www.ashcroft.com/products/test-instruments/test-gauges/) Helpful Tools - [Product Documentation](https://www.ashcroft.com/learn/product-documentation/) - [Product & Quality Certifications](https://www.ashcroft.com/about/quality-certifications/) - [Material Selector & Corrosion Guide](https://www.ashcroft.com/webtools/materialselector/) - [Unit Converter](https://www.ashcroft.com/webtools/calculatoruom/) - [Wake Frequency Calculator](https://www.ashcroft.com/webtools/calculatorwf/) - [FAQs](https://www.ashcroft.com/faq/) Keep your critical equipment and processes running with reliable pressure and temperature measurements. 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Subscribe now and get the latest blog posts delivered straight to your inbox. # How Do I Select a Pressure Transducer for Semiconductor UHP Gas Applications? Print/Save as PDF ![Nick Wilkes, Market Segment Leader's headshot](https://blog.ashcroft.com/hs-fs/hubfs/Wilks%2c%20Nick%201.jpg?width=50&height=50&name=Wilks%2c%20Nick%201.jpg) **By:** [Nick Wilkes](https://blog.ashcroft.com/author/nick-wilkes-market-segment-leader) Market Segment Leader **Published on:** January 8th, 2024 **Last updated on:** October 21st, 2026 **Topics:** [pressure transducers](https://blog.ashcroft.com/topic/pressure-transducers) [semiconductor industry](https://blog.ashcroft.com/topic/semiconductor-industry) [gas delivery systems](https://blog.ashcroft.com/topic/gas-delivery-systems) **Share:** [mailto:?subject=How+Do+I+Select+a+Pressure+Transducer+for+Semiconductor+UHP+Gas+Applications%3F&body=https://blog.ashcroft.com/challenges-selecting-transducers-for-semiconductor-manufacturing](mailto:?subject=How+Do+I+Select+a+Pressure+Transducer+for+Semiconductor+UHP+Gas+Applications%3F&body=https://blog.ashcroft.com/challenges-selecting-transducers-for-semiconductor-manufacturing) ![](https://blog.ashcroft.com/hs-fs/hubfs/SemiCond_GasMonitoring_BLOG_1026.jpg?width=1600&height=534&name=SemiCond_GasMonitoring_BLOG_1026.jpg) Selecting a pressure transducer for semiconductor ultra-high purity (UHP) gas applications requires careful consideration of size, accuracy, cleanliness, materials, sensing technology and resistance to electromagnetic interference (EMI). These applications involve highly specialized equipment and, in many cases, corrosive gases and chemicals that place unique demands on pressure measurement instrumentation. [Pressure transducers](https://www.ashcroft.com/products/pressure/pressure-sensors/) play a critical role in semiconductor manufacturing by measuring pressure throughout the production process and helping control the flow and distribution of UHP gases safely and effectively. However, not every pressure transducer is designed to meet the demanding requirements of semiconductor processes. Ashcroft and our parent company, Nagano Keiki Co., Ltd., have a long history of supplying pressure and temperature instrumentation to semiconductor manufacturers worldwide. In this article, you will learn about UHP gas processes, the challenges they create for pressure measurement and the features to consider when selecting a pressure transducer.  We also have a separate article that focuses on [pressure transducers for semiconductor UHP liquid applications](https://blog.ashcroft.com/challenges-selecting-transducers-for-semiconductor-liquid-applications) and [semiconductor air supply applications](https://blog.ashcroft.com/how-are-air-systems-monitored-in-semiconductor-manufacturing).  ## What makes pressure measurement challenging in semiconductor manufacturing? Semiconductor manufacturing requires precise pressure measurement within complex systems where cleanliness, accuracy and space are critical. Manufacturing a semiconductor involves numerous stages that transform a blank silicon wafer into a microelectronic device. Process chambers remove or layer materials onto the wafer, ultimately forming the pathways and junctions that enable electronic signals to flow and be stored. Precise measurement is needed throughout these processes to manage pressure, temperature, flow and other variables. Instruments used to monitor and control gas pressure, such as the Ashcroft® [ZT12 pressure transducer](https://www.ashcroft.com/products/pressure/pressure-sensors/zt12-high-purity-pressure-transmitter/), must provide accurate and repeatable measurements while helping maintain the high level of cleanliness required within the system. When selecting a [pressure transducer for semiconductor applications](https://www.ashcroft.com/solutions/semiconductor-pressure-instruments/), several factors should be considered. ### Why is pressure transducer size important in semiconductor equipment? A compact pressure transducer can help conserve valuable space while making installation and service easier in densely packed semiconductor equipment. UHP gas delivery systems transport gases from the source, such as a cylinder, to the process chamber where the wafers are located. These systems can inject UHP gases at relatively high compressed pressures before reducing pressure to near or below atmospheric pressure in the process chamber. Physical size can therefore be an important consideration when selecting instrumentation for semiconductor equipment. Larger is not necessarily better because space is often at a premium within process tools and their supporting equipment. A process tool chamber may contain: - 15 or more gas supply and vacuum lines - Thousands of wire harnesses - Sight glasses and openings - Heaters - Valves and regulators - Mass flow controllers - Pressure gauges and transducers - Other supporting devices In gas boxes, these components may be installed in high-density arrangements. Pressure transducers also need connections to both the gas and electrical systems while remaining accessible for calibration or output adjustment. Reducing the height and diameter of the transducer can make installation, access and servicing easier in these confined spaces. ### What sensing technology and materials should I consider? The sensing technology and materials used in a pressure transducer can directly affect its accuracy, stability, corrosion resistance and compatibility with UHP gases such as hydrogen. Factors that can influence transducer performance include the sensing technology, materials of construction and resistance to environmental conditions. In addition to purity, precision and corrosion resistance, hydrogen compatibility can be especially important. Hydrogen is used in several semiconductor processes. For example, it can serve as a scavenger gas to remove oxygen during epitaxy, a crystal growth process. One challenge with hydrogen is its potential to cause embrittlement in certain metals. Embrittlement can reduce a material's ductility and make it more brittle. In a pressure transducer with a diaphragm that repeatedly flexes like a spring, this can negatively affect repeatability and long-term stability. 316L stainless steel is commonly used because it provides broad corrosion resistance along with proven resistance to hydrogen embrittlement. ### How can hydrogen permeation affect pressure transducers? Hydrogen can permeate certain materials and potentially cause measurement drift in pressure transducers that use very thin isolation diaphragms and oil-filled sensing technologies. Some isolated piezoresistive sensing elements use diaphragms less than 0.001 in. (0.03 mm) thick, which is thinner than a typical human hair. Hydrogen ions can potentially pass through these thin diaphragms and dissolve into the oil backfill. This can create problems with measurement accuracy and drift, sometimes referred to as the "Jiffy Pop" effect. Thin-film sensing technologies, such as the chemical vapor deposition [(CVD)](https://www.ashcroft.com/learn/resource-center/?pageNumber=1&postTypes=video,resource&search=cvd&sortType=date&sortOrder=DESC) technology used in the Ashcroft® [ZT12](https://www.ashcroft.com/products/pressure/pressure-sensors/zt12-high-purity-pressure-transmitter/) and [ZT16](https://www.ashcroft.com/products/pressure/pressure-sensors/zt16-high-purity-pressure-transmitter/) pressure transducers, do not require an oil fill. These sensing elements also use a more robust diaphragm that is generally 10 to 30 times thicker, helping mitigate hydrogen permeation. ## Why is EMC/EMI resistance important for semiconductor pressure transducers? Pressure transducers used in semiconductor equipment should be designed to resist electromagnetic interference because EMI can disrupt measurement signals, cause drift and potentially damage electronic instrumentation. Electromagnetic compatibility (EMC) and electromagnetic interference (EMI) are important considerations in semiconductor manufacturing. Electromagnetic disturbances can come from common industrial equipment such as: - Motors - Pumps - Drives - High-voltage equipment - High-power processes - Plasma generation equipment - Ion-generating processes - Radio frequency (RF) fields These sources can create static discharge or strong electromagnetic fields that interfere with electronic instrumentation. For a pressure transducer, EMI may temporarily affect signal accuracy, contribute to long-term drift, reduce instrument life or, in severe cases, damage the device. The semiconductor industry developed SEMI E176 to address electromagnetic interference within semiconductor manufacturing environments. However, because EMI may not be completely eliminated, selecting pressure transducers designed to meet appropriate EMC/EMI requirements and testing them within the application are important considerations. ## What should I look for when selecting a UHP gas pressure transducer? A pressure transducer for semiconductor UHP gas service should combine compact construction, compatible materials, suitable sensing technology, accurate and repeatable performance, cleanliness and EMC/EMI resistance. When evaluating a transducer, consider: - **Physical size:** Compact dimensions can simplify installation in high-density gas boxes and process equipment. - **Accuracy and repeatability:** Reliable measurements are critical for controlling UHP gas pressure throughout semiconductor processes. - **Cleanliness:** Wetted components should meet the cleanliness requirements of the UHP gas system. - **Materials of construction:** Materials should be compatible with the process gases and resist corrosion and hydrogen embrittlement where applicable. - **Sensing technology:** Consider how the sensor design and diaphragm construction respond to hydrogen permeation and other process conditions. - **EMC/EMI resistance:** The transducer should be designed for the electromagnetic environment found within semiconductor manufacturing equipment. - **Serviceability:** Installation should allow appropriate access for calibration, adjustment and maintenance. Evaluating these factors together can help ensure the selected pressure transducer is appropriate for the specific requirements of the semiconductor process. ## How are semiconductor pressure measurement requirements changing? Semiconductor pressure measurement requirements continue to evolve as manufacturers increase production capacity, transistor density and equipment performance. Semiconductor suppliers continue to face pressure to increase production while improving reliability and controlling manufacturing and purchasing costs. Emerging technologies, including artificial intelligence (AI) and the Internet of Things (IoT), are also contributing to demand for increasingly advanced semiconductor devices. As manufacturing processes evolve, pressure measurement instrumentation must continue to meet demanding requirements for accuracy, cleanliness, reliability and compatibility with complex process gases. ## Ready to learn more? Selecting the right pressure transducer for a semiconductor UHP gas application requires understanding the process conditions, gas compatibility, space limitations and performance requirements of the system. Check out the related resources below or [contact us](https://www.ashcroft.com/contact/) if you need help selecting a pressure measurement solution for your semiconductor application. In the meantime, [download our guide](https://app.hubspot.com/pages/4021582/editor/60028783201/content) to learn more. [![Pressure Measurement Solutions for Semiconductor Applications](https://no-cache.hubspot.com/cta/default/4021582/interactive-217760268334.png)](https://blog.ashcroft.com/hs/cta/wi/redirect?encryptedPayload=AVxigLLwIBhxkKKQeoUM9pyb0%2BtQ%2BDw6k2k0oi4%2F4H5UCa4IBEm5x71z6ZLTBriLCZCOoiaJfhuFxL2V2k4D7qzThlP%2Bbwyi%2By0B4OX%2Ff3N%2BL3iV5sDEzpmDAPjC357UpJmNP9ShxP%2FR93WSlZcXn%2B5hybMTWAn7jod48xnlbYobQOM59XGSFCy0NtCb57jAsK0BoVb9AGOizoBJevzjE7wWtRiv9SwmYu6hU5Zg%2FHrwFMKKBVDP65JAFfhKaXdq5Vs2gQwevShHa38IxUtM6ycZ7w%3D%3D&webInteractiveContentId=217760268334&portalId=4021582) [Nick Wilkes, Market Segment Leader](https://blog.ashcroft.com/author/nick-wilkes-market-segment-leader) Nick Wilks is a Market Segment Leader with a focus on the Semiconductor market. He has worked extensively in the Sensor Industry in the US for over 30 years with companies specializing in piezoresistive and piezoelectric sensing technologies. Nick has a degree in Physics from the University of Bristol in the United Kingdom. Connect: [mailto:Nick.Wilkes@ashcroft.com](mailto:Nick.Wilkes@ashcroft.com) Topics: [pressure transducers](https://blog.ashcroft.com/topic/pressure-transducers) [semiconductor industry](https://blog.ashcroft.com/topic/semiconductor-industry) [gas delivery systems](https://blog.ashcroft.com/topic/gas-delivery-systems) Don't forget to share this post: ## Related Articles ### [![](https://blog.ashcroft.com/hs-fs/hubfs/Choosing%20Pressure%20Sensor%20for%20OHV_BLOG%20(1).png?width=1600&height=534&name=Choosing%20Pressure%20Sensor%20for%20OHV_BLOG%20(1).png) How Do You Choose a Pressure Sensor for Off-Highway Vehicles? 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